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Industries

Semiconductor Manufacturing 

Industries

Semiconductor Manufacturing

▐ Advanced Oil-Free Air Systems for Precision Semiconductor Environments

In semiconductor manufacturing, even trace amounts of contamination can impact product yield and reliability.

Compressed air plays a critical role in cleanroom pressurization, wafer handling, and tool operation—making air purity, pressure stability, and uptime essential.

Easyflex TurboAir systems, powered by Turbowin’s advanced oil-free turbo technology, provide ultra-clean, Class 0 certified air with smart control and minimal maintenance—supporting the high-performance demands of today’s fabs and semiconductor facilities.

▐ Why Easyflex TurboAir for Semiconductor Facilities? 

☑️ 100% Oil-Free, Contamination-Free Air

Our systems use NBW™ airfoil bearings and Ultra HEPM motors to deliver clean, lubrication-free air—ensuring safe operation in ISO-class cleanrooms and preventing yield loss from airborne oil particles.

☑️ Tight Pressure Control for Critical Equipment

Powered byTurbowin’sintelligent control architecture,EasyflexTurboAirprovides highly stable airflow with minimal pressure fluctuation—ideal for lithography tools, wafer handling systems, and vacuum chambers.

☑️ Low Vibration, Quiet Operation

The supersonic impeller and direct-drive motor operate with minimal vibration and acoustic impact—protecting sensitive equipment and improving working conditions in clean environments.

☑️ Minimal Maintenance, Maximum Uptime

With no belts, gears, or oil to manage, our compressors are built for 24/7 uptime—freeing up your maintenance team and eliminating unplanned disruptions.

☑️ Energy-Efficient Performance

Reduce operational costs and meet sustainability goals with high-efficiency, low-power consumption systems that deliver peak performance without compromise.

▐ Applications in Semiconductor Plants 

  • Cleanroom Air Supply
  • Dry Room Pressurization
  • Pneumatic Tool Operation
  • Process Air for Etching, Deposition, and Packaging
  • Vacuum System Support